在气体面板、气体柜和任何需要超纯气体进行晶片加工的地方提供卓越的颗粒过滤。紧凑的装置减少了整个气箱的占地面积，节省了宝贵的设备空间聚四氟乙烯膜提供了高效率的过滤，提高了产品产量低压降降低了低蒸汽压气体中的冷凝风险与所有种类的半导体工艺气体具有极好的兼容性，可与惰性和活性气体一起使用，包括臭氧
| PART NUMBER |
FITTING SIZE AND TYPE |
LENGTH |
| WG2F02JJ2 |
1/4" Butt weld tube |
133.4 mm (5.25") |
| WG2F02JJ4 |
1/2" Butt weld tube |
133.4 mm (5.25") |
| WG2F02PS1 |
1/4" compression seal (compatible with Swagelok fitting) male inlet/outlet |
115.5 mm (4.55") |
| WG2F02RR2 |
1/4" Gasket seal (compatible with VCR Fitting) male inlet/outlet |
127.0 mm (5.00") |
| WG2F02RR4 |
1/2" Gasket seal (compatible with VCR fitting) male inlet/outlet |
133.4 mm (5.25") |
| WG2F32PS1 |
3/8" Compression seal (compatible with Swagelok fitting) male inlet/outlet |
119.3 mm (4.70") |