电子/电力

韩国ATOVAC压力计流量计MPG1000 MPG2000
  • 韩国ATOVAC压力计流量计MPG1000 MPG2000

  • 韩国ATOVAC公司成立于1997年10月,开始开发半导体生产过程中的气体和真空控制系统、测量等主要部件。我们一直专注于气体和真空控制,这是半导体生产过程的核心。一家开发传感器和测量设备的公司。我公司开发了对流式仪表及控制器、Lon仪表及控制器、电容式压力计、节流阀控制器等真空设备的主要部件和传感器。对ATOVAC这个不断产生新想法并始终创造充满活力的企业文化的公司有着持续的兴趣和喜爱。ATOVAC正在加速开发MFC、MFC控制器、对流计和控制器、离子计和控制器,电容压力计、节流阀控制器等智能组件。ATOVAC将在未来和现在保持我们作为可靠和受人尊敬的公司的地位。

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Throttle valve

[APC200] APC200 [Throttle Valve Controller]

APC200 Throttle ValveController

APC200 Pressure & Flow Controller is a Digital PID Pressure Controller for throttle 

Valve, It can supply +/- 15VDC to power and provide a readout for an attached 

Capacitance Manometer & four mass flow controllers.

 

Features & Benefit

■ Maximum 4 channel MFC control out(2,4 channel available)

■ RS-232C PC Interface , TTL flow On/Off Command available

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GMC1200 [Flow & Pressure Controller]

GMC1200 Flow & Pressure Controller

Model GMC 1200 Flow & Pressure Controller can supply +/- 15 VDC to power and provide readout for attached MFC (Mass Flow Controller)’s.

It’s designed to control and display any flow meter or controller.

The flow rate set point (0 – 5 VDC) can be adjusted either through front panel controls or remotely through the rear panel RS232C PC interface.

GMC 1200 Flow & Pressure Controller provide readout pressure signal for attached Capacitance Manometers instead of Mass Flow Controllers.

It must be installed capacitance manometer display board instead of flow control board.

Pressure signal to display is 0 – 10 VDC only

 

Features & Benefits

■ Microprocessor based Controller

■ 16 bit Bipolar A/D Converter used

■ Displaying by  graphic LCD(128*64 dot)

■ User selectable Flow and Pressure units

■ User friendly numeric button data input such as set-point value etc,,,

■ Maximum 8 channel MFC control out(2,4,6,8 channel available)

■ Gas mixing ratio function

■ Accumulation function

■ Automatic upstream pressure control function

■ RS-232C PC Interface , TTL flow On/Off Command available

■ CE Mark compliant

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GMC220 [Power Supply & Readout Unit]

GMC220 Power Supply & Read out Unit

Model GMC 220A supplies power to MFC, displays actual gas flow value through MFC by taking analog signal, introduces any set point value that user wants to control in the front panel and is designed to confirm with actual flow value by using simple button switch.

And also, it can be inputted the full scale range for connected MFC and used to set gas correction factor in case of using the other gas to connected MFC.

 

 

Features & Benefits

■ Compact size as 2 channel, saving space

■ 12 bit Bipolar A/D Converter used

■ Displaying by 7-segment LED

■ Analog Volume data input such as set-point value etc...

■ Gas mixing ratio function

■ TTL flow On/Off Command available

 

LOGO

‭153 3523 8557‭153 3523 8557

无锡市锡山区锡北镇东房桥文八路142号无锡市锡山区锡北镇东房桥文八路142号

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